BL6:DXL
Deep X-ray Lithography (DXL)
Welcome to BL6a: Deep X-ray Lithography (DXL)
The Deep X-ray Lithography (DXL) beamline, Beamline 6a (BL6a), is one of the beamlines of the Synchrotron Light Research Institute (SLRI). It uses synchrotron X-rays to build three-dimensional micro-scale structures, such as micro-parts, and serves as an ASEAN-level laboratory for research and product development.
Beamline Layout
- Bending magnet 6 (BM6)
- Photon mask 1
- Photon beam position monitor (PBPM)
- Heat absorber shutter (ABS)
- Pneumatic valve 1 (PV1)
- Collimating mirror (CM)
- PV2
- Beam shutter (BS)
- PV3
- Wire scan & screen
- Be window 1
- PV4
- PV6
- Be window 2
- PV7
- X-ray scanner
Beamline 6a consists of three main areas: the front end, the X-ray screening and transportation section, and the end station. X-rays from bending magnet 6 pass through the components shown above in order, and the Be windows filter the beam to the 2–10 keV band before it reaches the X-ray scanner.
Specification
1.44 TBending magnet source
1.2 GeVElectron energy
2–10 keVTransmitted band-pass
90 mmHorizontal beam size
| Source | Bending magnet, 1.44 T |
|---|---|
| Electron energy | 1.2 GeV |
| Transmitted band-pass | 2–10 keV |
| Photoresist thickness | 5–1300 µm (SU-8); 5–500 µm (PMMA) |
| Beam size | 90 mm (H); 5.35 mm (V) without bending mirror, 3.75 mm (V) with bending mirror (at 0.6 MPa) |
| Vertical scanning speed | 2.87 mm/s |
| Scanning length | −60 mm to +60 mm |
| Sample rotation / tilt | 360° / ±60° |
